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Metamaterials, consisting of subwavelength resonant structures, can be artificially engineered to yield desired response to electromagnetic waves. In contrast to the naturally existing materials whose properties are limi...

This paper proposes an innovative automated multiphysics Microelectromechanical systems (MEMS) co-optimization platform integrating the embedded reduced-order modeling offered by Coventor MEMS+ with MATLAB’s numerical ...

Thanks to their large sensitivity to electromagnetic fields, microelectromechanical systems are becoming attractive for applications in the THz band (0.1–10 THz). However, up to date all THz electromechanical systems c...

Abstract With the continuous expansion of the application range of microelectromechanical systems, microdevice forming technology has achieved remarkable results. However, it is challenging to develop new microforming pr...

One-dimensional photonic crystal (1D-PhC) pillar cavities allow transducing mechanical pillar vibrations to the optical domain, thereby relaxing the requirements typically associated with mechanical motion detection. In ...

This work presents a novel approach to create and dynamically control quasi-bound states in the continuum (BIC) resonances through the hybridization of 1D and 2D metasurfaces using micro-electromechanical systems (MEMS)....