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Recent Advances on Nanocomposite Resists With Design Functionality for Lithographic Microfabrication
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Recent Advances on Nanocomposite Resists With Design Functionality for Lithographic Microfabrication
Martínez, Eduardo David et al · Frontiers Media · 2021 · ISSN 2296-8016
Nanocomposites formed by a phase-dispersed nanomaterial and a polymeric host matrix are highly attractive for nano- and micro-fabrication. The combination of nanoscale and bulk materials aims at achieving an effective in...
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