Current Application Status and Development Direction of High-end Magnetron Sputtering Target in China
Artículo
Acceso abierto
Artículo
DOAJ
High-end magnetron sputtering targets serve as the core foundational materials for fabricating critical functional films used in integrated circuits and flat panel displays. China currently faces a high external dependen...
LCC LCC:Engineering (General). Civil engineering (General)Idioma zho
Acceso abiertoRuta libre sin proxy. Acceso recomendado cuando no hay suscripción activa.
Open Access