Chapter Nanoimprint Lithography - Next Generation Nanopatterning Methods for Nanophotonics Fabrication
Viheril, Jukka · InTechOpen
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APA 7
Viheril, J. (s. f.). Chapter Nanoimprint Lithography - Next Generation Nanopatterning Methods for Nanophotonics Fabrication. InTechOpen. https://nodovox.com/record.php?id=219733
MLA
Viheril, Jukka. Chapter Nanoimprint Lithography - Next Generation Nanopatterning Methods for Nanophotonics Fabrication. InTechOpen. https://nodovox.com/record.php?id=219733.
Chicago
Viheril, Jukka. s. f. Chapter Nanoimprint Lithography - Next Generation Nanopatterning Methods for Nanophotonics Fabrication. InTechOpen. https://nodovox.com/record.php?id=219733.
Harvard
Viheril, J. s. f, Chapter Nanoimprint Lithography - Next Generation Nanopatterning Methods for Nanophotonics Fabrication, InTechOpen, available at: https://nodovox.com/record.php?id=219733 [Accessed 30 Jun. 2026].
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- Título
- Chapter Nanoimprint Lithography - Next Generation Nanopatterning Methods for Nanophotonics Fabrication
- Autor / colaboradores
- Viheril, Jukka
- Editorial
- InTechOpen
- ISSN
- 10.5772/6917