Enhancement of third-harmonic generation in all-dielectric kite-shaped metasurfaces driven by quasi-bound states in the continuum

We develop a new all-dielectric metasurface for designing high quality-factor (Q-factor) quasi-bound states in the continuum (quasi-BICs) using asymmetry kite-shaped nanopillar arrays. The Q-factors of quasi-BICs follow the quadratic dependence on the geometry asymmetry, and meanwhile their resonant spectral profiles can be readily tuned between Fano and Lorentzian lineshapes through the interplay with the broadband magnetic dipole mode. The third-harmonic signals of quasi-BIC modes exhibit a gain from 43.4- to 634-fold enhancement between samples with an axial-length difference of 15 nm and 75 nm when reducing the numerical aperture of the illuminating objective lenses in nonlinear measurement, which is attributed to the increasing illumination spot size and the less contribution from the large oblique incident light for establishing quasi-BIC modes with high-Q spectral profile and strong near-field intensity. The silicon-based metasurfaces with their simple geometry are facile for large-area fabrication and open new possibilities for the optimization of upconversion processes to achieve efficient nonlinear devices.