High-throughput, non-destructive, three-dimensional imaging of GaN threading dislocations with in-plane Burgers vector component via phase-contrast microscopy

Artículo

High-throughput, non-destructive, three-dimensional imaging of GaN threading dislocations with in-plane Burgers vector component via phase-contrast microscopy

Yukari Ishikawa et al · IOP Publishing · 2026

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Author / responsible party

Yukari Ishikawa et al

Publisher

IOP Publishing

Year

2026

ISSN

1882-0786

ISSN

1882-0786

Language

English

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We demonstrate a nondestructive, high-throughput method for imaging dislocations in GaN (0001) using phase-contrast microscopy (PCM). A one-to-one correspondence between threading dislocation contrasts in PCM and multiphoton excitation photoluminescence images confirms that PCM enables the detection of dislocations with in-plane Burgers vector components. The contrast morphology reflects dislocation inclination: vertical dislocations appear as dots, whereas inclined dislocations appear as lines. By shifting the focal plane from the top to the back surface, the three-dimensional propagation paths of dislocations can be traced. Dislocations separated by 1.3 μm are resolved. PCM also reveals scratches, subsurface scratches, facet boundaries, and voids.

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APA 7

al, Y. I. E. (2026). High-throughput, non-destructive, three-dimensional imaging of GaN threading dislocations with in-plane Burgers vector component via phase-contrast microscopy. https://doi.org/10.35848/1882-0786/ae5f58

MLA

al, Yukari Ishikawa et. "High-throughput, non-destructive, three-dimensional imaging of GaN threading dislocations with in-plane Burgers vector component via phase-contrast microscopy." 2026. https://doi.org/10.35848/1882-0786/ae5f58.

Chicago

al, Yukari Ishikawa et. 2026. "High-throughput, non-destructive, three-dimensional imaging of GaN threading dislocations with in-plane Burgers vector component via phase-contrast microscopy.". https://doi.org/10.35848/1882-0786/ae5f58.

Harvard

al, Y. I. E. 2026, High-throughput, non-destructive, three-dimensional imaging of GaN threading dislocations with in-plane Burgers vector component via phase-contrast microscopy, IOP Publishing, available at: https://doi.org/10.35848/1882-0786/ae5f58 [Accessed 7 Aug. 2026].

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Title: High-throughput, non-destructive, three-dimensional imaging of GaN threading dislocations with in-plane Burgers vector component via phase-contrast microscopy

Author / contributors: Yukari Ishikawa et al

Publisher: IOP Publishing

Publication year: 2026

ISSN: 1882-0786

ISSN: 1882-0786

Language: English

Subjects

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GaN; Phase contrast microscopy; threading dislocations; multiphoton excitation photoluminescence; nondestructive imaging