Integrated flexible hinge sensor design approach for electromagnetic force compensation weight detector

As the core component of the electromagnetic force compensation weight detector, the force measurement sensitivity of the integrated flexible hinge sensor directly determines the resolution of the electromagnetic force compensation weight detector to weigh the mass of object. To achieve higher resolution mass weighing, this paper focuses on the design method of the integrated flexible hinge sensor of the electromagnetic force compensation weight detector, specifically combines the Latin hypercubic sampling and finite element method, and adopts the binomial fitting, establishes a mathematical model of the correlation relationship between the thickness of the thin wall of the miniature hinge and the elasticity coefficient of the integrated flexible hinge sensor, which supports the fast and accurate calculation of the elasticity coefficient of the integrated flexible hinge sensor, and greatly improves the sensitivity of the force measurement of the integrated flexible hinge sensor. The design efficiency of the integrated flexible hinge sensor is greatly improved; a measurement method of the elasticity coefficient of the integrated flexible hinge sensor based on electromagnetic force and the capacitive micro-displacement sensor is proposed, which achieves efficient and accurate measurement of the elasticity coefficient. The elasticity coefficients of the prepared integrated flexible hinge sensor are simulated and measured, with the specific results of 263.4 N/m and 328.2 N/m, which are basically in the same order of magnitude. Finally, this paper discusses the feasibility of exploring detection technologies that can achieve higher micro-displacement resolution from an electromagnetic measurement perspective to further enhance the mass weighing resolution of electromagnetic force compensation weight detectors, under the condition that the integrated flexible hinge sensor has basically reached its sensitivity limit.