Hybrid SiO2/Si pillar-based optomechanical crystals for on-chip photonic integration

One-dimensional photonic crystal (1D-PhC) pillar cavities allow transducing mechanical pillar vibrations to the optical domain, thereby relaxing the requirements typically associated with mechanical motion detection. In this study, we integrate these geometries into a silicon-on-insulator photonics platform and explore their optical and mechanical properties. The 1D-PhC structures consist of a linear array of high aspect ratio nanopillars with nanometer-sized diameters, designed to enhance the interaction between transverse-magnetic (TM) polarized optical fields and mechanical vibrations and to minimize optical leaking to the substrate. Integrated waveguides are engineered to support TM-like modes, which enable optimized coupling to the 1D-PhC optical cavity modes via evanescent wave interaction. Finite element method simulations and experimental analyses reveal that these cavities achieve relatively high optical quality factors (Q ∼ 4 × 103). In addition, both simulated and experimentally measured mechanical vibrational frequencies show large optomechanical coupling rates exceeding 1 MHz for the fundamental cantilever-like modes. By tuning the separation between the 1D-PhC and the waveguide, we achieve optimal optical coupling conditions that enable the transduction of thermally activated mechanical modes across a broad frequency range – from tens to several hundreds of MHz. This enhanced accessibility and efficiency in mechanical motion transduction significantly strengthens the viability of established microelectromechanical (MEMS) and nanoelectromechanical systems (NEMS) technologies based on nanowires, nanorods, and related structures, particularly in applications such as force sensing and biosensing.