Ultrafast laser manufacturing of nanofluidic systems

In the last decades, research and development of microfluidics have made extraordinary progress, since they have revolutionized the biological and chemical fields as a backbone of lab-on-a-chip systems. Further advancement pushes to miniaturize the architectures to nanoscale in terms of both the sizes and the fluid dynamics for some specific applications including investigation of biological sub-cellular aspects and chemical analysis with much improved detection limits. In particular, nano-scale channels offer new opportunities for tests at single cell or even molecular levels. Thus, nanofluidics, which is a microfluidic system involving channels with nanometer dimensions typically smaller than several hundred nm, has been proposed as an ideal platform for investigating fundamental molecular events at the cell-extracellular milieu interface, biological sensing, and more recently for studying cancer cell migration in a space much narrower than the cell size. In addition, nanofluidics can be used for sample manipulation in analytical chemistry, such as sample injections, separation, purifications or for quantitative and qualitative determinations. Among the nanofabrication technologies, ultrafast laser manufacturing is a promising tool for fabrication of nanofluidics due to its flexibility, versatility, high fabrication resolution and three dimensional (3D) fabrication capability. In this paper, we review the technological advancements of nanofluidic systems, with emphasis on fabrication methods, in particular ultrafast laser manufacturing. We present the challenges for issues concerning channel sizes and fluid dynamics, and introduce the applications in physics, biology, chemistry and engineering with future prospects.