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Inelastic energy loss of Ar ions scattered Al2O3 surface under grazing incidence

A.S. Ashirov et al · Vasyl Stefanyk Carpathian National University · 2021

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Author / responsible party
A.S. Ashirov et al
Publisher
Vasyl Stefanyk Carpathian National University
Year
2021
ISSN
1729-4428
ISSN
1729-4428
Language
English

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In this paper presents the investigation of the surface Al2O3 by ion scattering spectroscopy. The trajectory of small angle scattered ions calculated by the method of binary collision approximation. It was found dependence of inelastic energy loss and trajectories of scattered ions. The value of inelastic energy loss scattered ions almost depend to the angle of incidence and the geometrical parameters of surface semichannels.

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APA 7

al, A. A. E. (2021). Inelastic energy loss of Ar ions scattered Al2O3 surface under grazing incidence. https://doi.org/10.15330/pcss.22.2.255-259

MLA

al, A.S. Ashirov et. "Inelastic energy loss of Ar ions scattered Al2O3 surface under grazing incidence." 2021. https://doi.org/10.15330/pcss.22.2.255-259.

Chicago

al, A.S. Ashirov et. 2021. "Inelastic energy loss of Ar ions scattered Al2O3 surface under grazing incidence.". https://doi.org/10.15330/pcss.22.2.255-259.

Harvard

al, A. A. E. 2021, Inelastic energy loss of Ar ions scattered Al2O3 surface under grazing incidence, Vasyl Stefanyk Carpathian National University, available at: https://doi.org/10.15330/pcss.22.2.255-259 [Accessed 8 Aug. 2026].

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Title
Inelastic energy loss of Ar ions scattered Al2O3 surface under grazing incidence
Author / contributors
A.S. Ashirov et al
Publisher
Vasyl Stefanyk Carpathian National University
Publication year
2021
ISSN
1729-4428
ISSN
1729-4428
Language
English

Subjects

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ion scattering; semichannel; computer simulation; inelastic energy loss
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