Deterministic reflection contrast ellipsometry for thick multilayer two-dimensional heterostructures

Optical spectroscopy is a powerful tool for characterizing the properties of two-dimensional (2D) heterostructures. However, extracting the permittivity information of each 2D layer in optically thick heterostructures is challenging because of interference. To accurately measure the optical permittivity of each 2D layer in a heterostructure or on a substrate with a thick insulating spacer, such as oxides, we propose deterministic reflection contrast ellipsometry (DRCE). Our DRCE method has two advantages over conventional techniques. It deterministically measures the optical permittivity of 2D materials using only the measured reflection spectra of the heterostructure, rather than dispersion fitting as in spectroscopic ellipsometry. Additionally, the DRCE is free of excitonic energy errors in reflection-contrast spectroscopy. We believe that DRCE will enable accurate and rapid characterization of 2D materials.