Recent advances in nano-opto-electro-mechanical systems

Nano-opto-electro-mechanical systems (NOEMS), considered as new platforms to study electronic and mechanical freedoms in the field of nanophotonics, have gained rapid progress in recent years. NOEMS offer exciting opportunities to manipulate information carriers using optical, electrical, and mechanical degrees of freedom, where the flow of light, dynamics of electrons, and mechanical vibration modes can be explored in both classical and quantum domains. By exploiting NOEMS concepts and technologies, high speed and low-power consumption switches, high-efficiency microwave-optical conversion devices, and multiple quantum information processing functions can be implemented through on-chip integration. This review will introduce the principles of NOEMS, summarize the recent developments, and important achievements, and give a prospect for the further applications and developments in this field.